Definition
Automated transport, transfer and positioning of semiconductor wafers or wafer carriers by robots and material-handling systems instead of direct manual handling.
Application
Used within process tools and across fabs to move wafers between carriers, load ports, stockers and equipment while improving repeatability, throughput, traceability and contamination control.
Related search terms
Automated wafer handling; robotic wafer handling
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/blogs/technology-trends/automated-material-handling-for-semiconductor-assembly-and-test
- Evidence from store-us.semi.orghttps://store-us.semi.org/products/e15300-semi-e153-specification-for-amhs-sem-amhs-sem