Definition
The coordinated use of software, controls, communications, robotics and material-handling systems to execute semiconductor manufacturing tasks with reduced manual intervention.
Application
Used for equipment control, recipe execution, scheduling and dispatch, material movement, process control, data collection and increasingly lights-out or highly autonomous fab operations.
Related search terms
Factory automation; semiconductor fab automation
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/advanced-semiconductor-manufacturing-conference-asmc/2024-session-18-factory-automation
- Evidence from semi.orghttps://www.semi.org/en/about/AMAT