Definition
A semiconductor manufacturing control approach that uses equipment and process data, statistical or computational models, and automated feedback or feed-forward actions to improve process performance and reduce variation.
Application
Used for run-to-run control, virtual metrology, excursion detection, process optimization and yield improvement across wafer-fab process steps.
Related search terms
Advanced Process Control
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/asmc2020-technical-session-6
- Evidence from semi.orghttps://www.semi.org/en/advanced-semiconductor-manufacturing-conference-asmc/2024-session-15-advanced-process-control-2