Definition
Fault Detection and Classification (FDC) is a semiconductor manufacturing control method that collects and analyzes equipment and process-parameter data to detect abnormal behavior and classify faults or excursions so corrective action can be taken quickly.
Application
Fabs use FDC on production tools to flag deviations in sensor traces or process behavior, distinguish fault classes, prevent unexpected equipment/process excursions, and improve uptime, consistency, cycle time, and yield.
Related search terms
FDC; equipment fault detection and classification
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Related concepts
Evidence and further reading
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-launches-breakthrough-e3-equipment-and-process
- Evidence from investor.appliedmaterials.comhttps://investor.appliedmaterials.com/news-releases/news-release-details/applied-materials-awarded-key-service-contract-fujitsu