Definition
A process excursion is an abnormal process or defect condition that departs from normal manufacturing behavior enough to require detection during production.
Application
Semiconductor inspection systems are used to detect or predict excursions early, identify yield-relevant defects, and support root-cause analysis and process-control improvement.
Related search terms
Manufacturing excursion; Process outlier event
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Related concepts
Evidence and further reading
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/227/kla-tencor-announces-adoption-of-candela-inspection
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/199/kla-tencor-announces-new-es805-electron-beam-inspection