Definition
Process drift is a time-dependent change in process or measurement behavior that moves data away from its established historical pattern or model.
Application
In semiconductor manufacturing, drift is monitored because sensor or data drift can reduce process-control and virtual-metrology performance; semiconductor studies track drift and shift in process data such as chemical mechanical planarization measurements.
Related search terms
Manufacturing process drift; Tool drift
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/nistsematech-engineering-statistics-handbook-chapter-6-process-or-product-monitoring
- Evidence from nist.govhttps://www.nist.gov/publications/comparative-study-semiconductor-virtual-metrology-methods-and-novel-algorithmic