Definition
A time-ordered statistical process-control chart that plots a measured process characteristic or statistic against a center line and statistically derived control limits.
Application
Used in semiconductor manufacturing to detect unusual variation, trends or out-of-control conditions in parameters such as film thickness, critical dimension, particle counts, etch rate or equipment performance before they become major yield excursions.
Related search terms
Shewhart control chart
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Related concepts
Evidence and further reading
- Evidence from itl.nist.govhttps://www.itl.nist.gov/div898/handbook/pmc/section3/pmc31.htm
- Evidence from itl.nist.govhttps://www.itl.nist.gov/div898/handbook/pmc/section1/pmc12.htm