Definition
Process control is the monitoring of process behavior and measured outputs to determine whether a manufacturing process remains stable and to signal when corrective action is needed.
Application
In semiconductor manufacturing, process control uses monitoring and measurement together with methods such as statistical process control, virtual metrology, and run-to-run control to detect degradation or variation and support corrective or adaptive process decisions.
Related search terms
Semiconductor process control; Manufacturing process control
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/nistsematech-engineering-statistics-handbook-chapter-6-process-or-product-monitoring
- Evidence from nist.govhttps://www.nist.gov/publications/virtual-metrology-white-paper-international-roadmap-devices-and-systemsirds