Definition
The hardware, control software and communications functions that allow semiconductor manufacturing equipment to execute recipes and jobs, report state and data, track wafers or carriers, and coordinate automatically with factory information systems.
Application
Used in automated fabs to connect process tools with factory systems for recipe/process execution, carrier management, substrate tracking, control jobs, data collection and coordinated material flow using standards such as SECS/GEM and GEM300.
Related search terms
Semiconductor equipment automation; tool automation
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/standards-watch-2022-Sept/intro-to-semi-communication-standards
- Evidence from semi.orghttps://www.semi.org/en/standards-watch-2021Dec/gem300-tutorial-overview