Definition
A semiconductor-tool front-end module that provides the interface between wafer carriers and the process equipment, typically incorporating load ports, carrier-handling functions and a substrate-handling robot within a controlled mini-environment.
Application
Used to receive FOUPs or other wafer carriers, open or interface with the carrier, identify and transfer wafers to the tool or load locks, and maintain controlled wafer handling at the atmospheric front end of automated semiconductor equipment.
Related search terms
Tool front-end module; equipment front end; wafer front-end module
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/sites/semi.org/files/2024-03/CompilationTerms0124.pdf
- Evidence from store-us.semi.orghttps://store-us.semi.org/products/e10100-semi-e101-guide-for-efem-functional-structure-model