Definition
A holder, such as a cassette, box, pod, or boat, that contains one or more wafers.
Application
Holds wafers during transport, storage, or processing, including wet chemical processing in suitable process carriers.
Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/sites/semi.org/files/2024-07/CompilationTerms0624.pdf
- Evidence from entegris.comhttps://www.entegris.com/shop/en/USD/Products/Wafer-Handling/Wafer-Processing/200-mm-Wafer-Processing/c/200mmwaferprocessing