Definition
Standard Mechanical Interface: a pod-and-equipment interface concept that transfers wafer cassettes between a clean transport enclosure and a clean equipment environment while limiting exposure to outside contamination.
Application
Protects wafers during storage, transport and transfer into or out of compatible processing equipment.
Related search terms
Standard Mechanical Interface
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Related concepts
Evidence and further reading
- Evidence from store-us.semi.orghttps://store-us.semi.org/products/e01900-semi-e19-specification-for-standard-mechanical-interface-smif
- Evidence from entegris.comhttps://www.entegris.com/content/dam/product-assets/a200wafersmifpods/manual-a200-200mm-smif-pod-7373.pdf