SECS/GEM

Definition

A set of SEMI standards for communication between manufacturing equipment and factory host systems, combining SECS-II message definitions with the Generic Equipment Model (GEM) for equipment behavior and control.

Application

Used to integrate semiconductor equipment with factory automation for data and event reporting and, where implemented, alarm reporting, remote commands and process-recipe exchange.

Related concepts

• Equipment Automation
• Manufacturing Execution System
• Process Recipe
• Semiconductor Fab

Evidence and further reading

• Evidence from semi.orghttps://www.semi.org/en/standards-watch-2022-Sept/intro-to-semi-communication-standards
• Evidence from cimetrix.comhttps://www.cimetrix.com/hubfs/docs/Whitepapers/Intro-SEMI-Standards-GEM-and-PV2.pdf?hsLang=en