Definition
A process recipe is the controlled set of instructions and parameter values that semiconductor equipment executes for a processing operation, including the ordered steps and settings for variables such as time, temperature, pressure, gas flow, power, or motion.
Application
Used to reproduce approved process conditions on production tools; recipe management, version control, selection, verification, and traceability help prevent wrong-parameter processing and support automation and run-to-run control.
Related search terms
Equipment recipe; Manufacturing recipe
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Related concepts
Evidence and further reading
- Evidence from siemens.comhttps://www.siemens.com/en-gb/products/opcenter/execution/semiconductor/
- Evidence from ontoinnovation.comhttps://ontoinnovation.com/products/discover-rms/