Definition
A semiconductor manufacturing platform that connects multiple process chambers to a shared wafer-transfer environment so sequential steps can be performed without exposing the wafer to the ambient fab atmosphere.
Application
Used for integrated etch, deposition, clean or surface-preparation sequences, improving throughput and interface control while reducing contamination and native-oxide regrowth between tightly coupled process steps.
Related search terms
Multi-chamber cluster tool; integrated process cluster
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/news-resources/press/Samco-introduces_Cluster_H
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-opens-milestone-epic-facility-process