Deposition, Epitaxy & Thin Films
Browse 40 glossary entries in Deposition, Epitaxy & Thin Films. Open a term for its definition, application, related concepts and evidence.
40 entries
- ALD Cycle
- ALD Saturation
- ALD Window
- Aluminum Oxide
- Area-Selective Deposition
- Atomic Layer Deposition
- Chemical Vapor Deposition
- Cluster Tool
- Conformality
- Deposition
- Deposition Rate
- Electroplating
- Epitaxial Layer
- Epitaxy
- Film Stress
- Film Thickness
- Growth Per Cycle
- Heteroepitaxy
- In-Situ Doping
- Low Pressure Chemical Vapor Deposition
- Metal-Organic CVD
- MOCVD Reactor
- Physical Vapor Deposition
- Plasma-Enhanced ALD
- Plasma-Enhanced CVD
- Precursor
- Purge
- Reactive Sputtering
- RF Sputtering
- Selective ALD
- Selective Epitaxy
- Silane
- Silicon Nitride
- Source/Drain Epitaxy
- Sputter Target
- Sputtering
- Step Coverage
- Thin Film
- Thin Film Deposition
- Vapor Phase Epitaxy
Continue learning with PTI
Related PTI training covers the following parts of this topic. See each course outline for its scope.
- Fundamentals of ALD, ALE and Precursor Chemistries
ALD chemistry, precursors, film growth and area-selective deposition.