Definition
Film thickness is the physical thickness of a deposited, grown, or coated material layer on a wafer or device structure, measured from one interface to the other and commonly specified from angstroms or nanometers through micrometers depending on the process.
Application
Thickness metrology verifies deposition, oxidation, resist coating, and other film processes against target values and uniformity requirements because thickness affects electrical, optical, mechanical, and pattern-transfer performance.
Related search terms
Thin-film thickness; layer thickness
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Related concepts
Evidence and further reading
- Evidence from spts.comhttps://www.spts.com/products/instruments/optical-profilers/zeta-388
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/product-library/centura-epi-200mm.html