Definition
Oxide thickness is the physical thickness of an oxide layer formed or deposited on a semiconductor surface.
Application
Measured and controlled because oxide thickness influences dielectric behavior and process/device characteristics; it can be characterized by techniques such as capacitance-based measurement.
Related concepts
Evidence and further reading
- Evidence from onlinelibrary.wiley.comhttps://onlinelibrary.wiley.com/doi/10.1002/0471749095.ch6
- Evidence from semiconductor.samsung.comhttps://semiconductor.samsung.com/support/tools-resources/fabrication-process/eight-essential-semiconductor-fabrication-processes-part-2-oxidation-to-protect-the-wafer/