Definition
Oxidation is a semiconductor process in which silicon reacts with an oxidizing ambient to grow a silicon dioxide layer; thermal oxidation may use dry or wet ambients.
Application
Used to form controlled SiO2 layers for dielectric, surface-protection, and masking functions in silicon device fabrication.
Related concepts
Evidence and further reading
- Evidence from semiconductor.samsung.comhttps://semiconductor.samsung.com/support/tools-resources/fabrication-process/eight-essential-semiconductor-fabrication-processes-part-2-oxidation-to-protect-the-wafer/
- Evidence from research.ibm.comhttps://research.ibm.com/publications/thermal-oxidation-of-silicon-new-experimental-results-and-models