Definition
Thermal oxidation that uses water vapor as the oxidizing species, as in the conversion of silicon to silicon dioxide.
Application
Used to grow silicon-dioxide layers in silicon processing and oxidized AlAs or AlGaAs layers for current confinement in vertical-cavity surface-emitting lasers.
Related concepts
Evidence and further reading
- Evidence from utep.eduhttps://www.utep.edu/engineering/nanomil/processes/oxidation_basics.html
- Evidence from mbe.mntl.illinois.eduhttps://mbe.mntl.illinois.edu/workdone.htm