Definition
Measurement science applied to semiconductor materials, structures, dimensions, films, devices, and process parameters with characterized measurement performance and quantified uncertainty.
Application
Used to measure process outputs, monitor variation, qualify manufacturing steps, and provide feedback for semiconductor process control.
Related search terms
semiconductor measurement science
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/chips/research-development-programs/metrology-program
- Evidence from nist.govhttps://www.nist.gov/system/files/documents/pml/wmd/pubs/2016/06/30/WMConnections-Vol7-Issue4-July2016.pdf