Definition
A semiconductor fabrication process that adds a controlled layer of material to a wafer or existing structure by delivering atoms, molecules or ions to the surface and forming a film.
Application
Used to build conductors, dielectrics, semiconductors, barriers, liners, passivation and epitaxial layers through methods including CVD, PVD, ALD and electrochemical deposition, selected for thickness, conformality, composition and throughput requirements.
Related search terms
Thin-film deposition; film deposition
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Related concepts
Evidence and further reading
- Evidence from lamresearch.comhttps://www.lamresearch.com/products/our-processes/deposition/
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-celebrates-20-year-success-endura-system-new