Definition
The rate at which film thickness increases during a deposition process, normally expressed as thickness per unit time such as nm/min; for cyclic processes, growth per cycle may instead be the more useful metric.
Application
Used to set deposition time, throughput and thickness-control recipes and to characterize process stability. Rate is tracked with film thickness and uniformity because changes can indicate chamber, chemistry, power or temperature drift.
Related search terms
Film growth rate; deposition speed
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Related concepts
Evidence and further reading
- Evidence from corial.plasmatherm.comhttps://corial.plasmatherm.com/en/products/corial-d250l-pecvd-deposition-tool
- Evidence from lamresearch.comhttps://www.lamresearch.com/products/our-processes/deposition/