Definition
A material layer whose thickness is comparable to or smaller than a relevant length scale of the system, so what counts as thin depends on the physical context.
Application
Used as insulating layers, conductive wiring layers and copper-diffusion barriers in semiconductor fabrication.
Related concepts
Evidence and further reading
- Evidence from tf.uni-kiel.dehttps://www.tf.uni-kiel.de/matwis/amat/semitech_en/kap_3/backbone/r3_1_1.html
- Evidence from news.skhynix.comhttps://news.skhynix.com/en/semiconductor-front-end-process-episode-5/