Definition
Heteroepitaxy is epitaxial crystalline growth in which the deposited crystal is a different material or composition from the underlying crystalline substrate or layer.
Application
It is used to integrate semiconductor materials with different bandgaps or properties, while managing lattice mismatch, dislocations, and heterointerfaces in advanced electronic and photonic devices.
Related concepts
Evidence and further reading
- Evidence from crystal.stanford.eduhttps://crystal.stanford.edu/
- Evidence from asm.comhttps://www.asm.com/our-technology-products/epitaxy