Definition
Chemical vapor deposition or epitaxial growth process that uses metal-organic precursors to form compound-semiconductor and other thin-film materials on heated substrates.
Application
Used extensively for III-V and GaN epitaxy, including LED, laser, RF, and power-device material stacks requiring controlled composition and layer thickness.
Related search terms
MOVPE; metalorganic chemical vapor deposition
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Related concepts
Evidence and further reading
- Evidence from aixtron.comhttps://www.aixtron.com/en/innovation/technologies/mocvd
- Evidence from nanoguide.stanford.eduhttps://nanoguide.stanford.edu/guide/equipment/purpose/deposition/chemical-vapor-deposition-cvd