Definition
Plasma-enhanced atomic layer deposition (PEALD) is ALD in which a plasma supplies reactive species or reaction energy during one or more steps of the self-limiting deposition cycle.
Application
Used to deposit thin, conformal films while enabling reactions at lower substrate temperatures or with chemistries that benefit from plasma activation.
Related search terms
Plasma-Enhanced Atomic Layer Deposition; Plasma-Enhanced ALD
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Related concepts
Evidence and further reading
- Evidence from asm.comhttps://www.asm.com/our-technology-products/ald
- Evidence from plasma.oxinst.comhttps://plasma.oxinst.com/products/ald/flexal-ald