Definition
Crystalline semiconductor growth used to form a transistor’s source and drain regions, commonly by selective deposition on designated semiconductor areas.
Application
Used in advanced transistors to control source/drain material composition and doping and, with suitable materials, to introduce channel strain that improves carrier transport.
Related search terms
S/D epitaxy
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Related concepts
Evidence and further reading
- Evidence from asm.comhttps://www.asm.com/our-technology-products/epitaxy
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/in/en/semiconductor/semiconductor-technologies/epitaxy.html