Definition
Epitaxial semiconductor growth on selected exposed crystalline regions while deposition on surrounding dielectric masks is suppressed under the chosen process conditions.
Application
Used to form transistor source/drain regions, including silicon-based epitaxial layers with controlled doping.
Related search terms
selective epitaxial growth
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from asm.comhttps://www.asm.com/our-technology-products/epitaxy
- Evidence from pure.jbnu.ac.krhttps://pure.jbnu.ac.kr/en/publications/low-temperature-selective-si-epitaxy-by-reduced-pressure-chemical/