Definition
A crystalline semiconductor film grown on a crystalline substrate so that the deposited layer has a defined crystallographic relationship to the underlying material; composition, doping and strain may be engineered during growth.
Application
Used to create controlled channel, source/drain, buffer and device layers in advanced logic, power and specialty semiconductors, including selective Si, SiGe and SiP structures and epitaxial starting wafers.
Related search terms
Epi layer; epitaxial film
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Related concepts
Evidence and further reading
- Evidence from asm.comhttps://www.asm.com/our-technology-products/epitaxy
- Evidence from asm.comhttps://www.asm.com/our-technology-products/epitaxy/intrepid-es