Definition
The crystallographic direction or plane relationship of a single crystal to a specified reference, commonly the wafer surface; silicon wafers are supplied with orientations such as (100), (110) or (111).
Application
Specified during crystal growth and wafering because orientation affects surface atomic arrangement, anisotropic etching, cleavage, epitaxy and some device/process behavior; wafer flats or notches help identify wafer orientation.
Related search terms
Wafer orientation; crystallographic orientation
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Related concepts
Evidence and further reading
- Evidence from sumcosi.comhttps://www.sumcosi.com/english/products/process/
- Evidence from wolfspeed.comhttps://www.wolfspeed.com/products/materials/