Definition
Ejection of atoms or molecules from a material surface by energetic-particle bombardment; in sputter deposition, the ejected target material forms a thin film on a substrate.
Application
Used in physical vapor deposition to produce thin films, including metal and dielectric coatings, with the target and excitation method selected for the material.
Related concepts
Evidence and further reading
- Evidence from ul.qucosa.dehttps://ul.qucosa.de/api/qucosa%3A88398/attachment/ATT-0/
- Evidence from lesker.comhttps://www.lesker.com/leskertech/archives/0g11m3h/leskertech_v7_i1.pdf