Definition
A dielectric ceramic material with the chemical formula Al2O3 that can be deposited as a thin film, including by ALD, for electrically insulating, barrier and surface-passivation functions.
Application
Used in semiconductor dielectric, passivation, encapsulation and selected gate-stack or capacitor applications where a conformal insulating oxide is required.
Related search terms
Alumina
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Related concepts
Evidence and further reading
- Evidence from asm.comhttps://www.asm.com/our-technology-products/ald
- Evidence from asm.comhttps://www.asm.com/media/3xuppljv/annual-report-2024-asm-final.pdf