Definition
Passivation is a semiconductor surface or interface treatment or layer that reduces electrically active surface states or unwanted surface reactions and stabilizes the surface.
Application
Used to improve semiconductor interface quality, protect sensitive surfaces, and stabilize electrical behavior in devices and structures.
Related concepts
Evidence and further reading
- Evidence from research.ibm.comhttps://research.ibm.com/publications/h-plasma-cleaning-and-a-si-passivation-of-gaas-for-surface-channel-device-applications
- Evidence from research.ibm.comhttps://research.ibm.com/publications/inversion-mode-n-channel-gaas-field-effect-transistor-with-high-k-metal-gate