Gate Dielectric

09 FEOL Devices & Advanced Transistors

Definition

The electrically insulating layer between a FET gate electrode and semiconductor channel; its capacitance and leakage strongly influence electrostatic control, switching, and reliability.

Application

Used in MOSFET gate stacks, where SiO2 or high-k materials provide gate-to-channel insulation while enabling strong capacitive coupling.

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Gate Dielectric

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