High-k Dielectric

09 FEOL Devices & Advanced Transistors

Notation high-k

Definition

A high-k dielectric is an insulating material with a dielectric constant higher than silicon dioxide, allowing greater gate capacitance at a physically thicker dielectric layer.

Application

High-k gate dielectrics such as hafnium-based materials reduce gate leakage while maintaining electrostatic control in scaled MOS transistors.

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high dielectric constant

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