Definition
High-k metal gate (HKMG) is a transistor gate-stack technology that combines a high-k gate dielectric with a metal gate electrode instead of the traditional SiO2/polysilicon stack.
Application
HKMG reduces gate leakage and supports continued transistor scaling while providing suitable gate work function and electrostatic control in advanced CMOS.
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high k metal gate
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Evidence and further reading
- Evidence from intel.comhttps://www.intel.com/pressroom/kits/advancedtech/doodle/ref_HiK-MG/high-k.htm
- Evidence from intel.comhttps://www.intel.com/pressroom/archive/releases/2007/20071025corp.htm