Definition
Silicon hydride, a molecular compound with the formula SiH4, used as a gaseous precursor in semiconductor thin-film deposition.
Application
Used as a silicon source in chemical vapor deposition, for example in plasma-enhanced deposition of silicon nitride films.
Related search terms
Monosilane; Silicon tetrahydride
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Related concepts
Evidence and further reading
- Evidence from webbook.nist.govhttps://webbook.nist.gov/cgi/cbook.cgi?ID=C7803625&Mask=2EE0
- Evidence from nanoguide.stanford.eduhttps://nanoguide.stanford.edu/guide/materials/silicon-nitride