Definition
A vacuum-flow regime in which the gas mean free path is much larger than the characteristic dimensions of the vessel or piping, so molecule-surface collisions dominate over molecule-molecule collisions.
Application
Used to analyze gas transport, conductance, pumping, and pressure behavior in high- and ultrahigh-vacuum semiconductor process systems.
Related search terms
free molecular flow
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Related concepts
Evidence and further reading
- Evidence from content.leybold.comhttps://content.leybold.com/migration/en/knowledge/what-is-molecular-flow
- Evidence from leybold.comhttps://www.leybold.com/en-uk/knowledge/vacuum-fundamentals/fundamental-physics-of-vacuum/flow-rate-and-types-of-flow