Definition
A preclean is a surface-cleaning step performed immediately before a semiconductor process to remove native oxide, residues, or other contaminants that could degrade the next interface or film.
Application
Used before contact formation, metallization, deposition, or related integration steps to prepare a clean surface and improve interface quality or contact resistance.
Related search terms
Pre-clean; Pre-process clean
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Related concepts
Evidence and further reading
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/product-library/endura-alps-pvd-alps-co-ni.html
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/jp/ja/semiconductor/products/processes/pvd/charger-ubm-pvd.html