Definition
In semiconductor manufacturing, water purified to very low levels of ionic, organic, particulate and microbial contamination.
Application
Used to wash wafer surfaces and remove inorganic salts and organic residues.
Related search terms
Ultrapure Water
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Related concepts
Evidence and further reading
- Evidence from semiconductors.orghttps://www.semiconductors.org/wp-content/uploads/2018/08/2011Yield.pdf
- Evidence from campaign.veoliawatertechnologies.co.ukhttps://campaign.veoliawatertechnologies.co.uk/en-gb/ultrapure-water-systems-for-semiconductor-manufacturing