Definition
Water treated to remove dissolved ionic species by ion-exchange or related purification. In semiconductor fabs, deionized water is typically further purified and tightly controlled as ultra-pure water for sensitive wafer processes.
Application
Used extensively for wafer rinsing and cleaning, diluted process chemistries, tool and facility water service, and drying-related operations, where trace ions, particles, organics or metals can create defects or contamination.
Related search terms
DI water; deionized water
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from entegris.comhttps://www.entegris.com/en/home/about-us/events/surface-preparation-and-cleaning-spcc-2026.html
- Evidence from entegris.comhttps://www.entegris.com/en/home/resources/technical-information/faq/contamination-control-in-ultrapure-chemicals-and-water.html