Definition
Ventilation that removes solvent-containing air and vapors from processing equipment or work areas and conveys the exhaust away from the point of use.
Application
Used with solvent benches and solvent-based lithography or cleaning processes to capture emissions and route them to suitable exhaust or treatment systems.
Related search terms
organic solvent exhaust
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Related concepts
Evidence and further reading
- Evidence from semiconductors.orghttps://www.semiconductors.org/wp-content/uploads/2023/09/Version-1.1-The-Socio-economic-Impact-of-a-Potential-PFAS-Restriction-on-the-Semiconductor-Value-Chain-in-Europe.pdf
- Evidence from colorado.eduhttps://www.colorado.edu/facility/cosinc/facilities