Definition
Photolithography is an optical pattern-transfer process in which light selectively exposes photoresist on a wafer, commonly using a mask or reticle or through direct optical writing, followed by development to form a resist pattern.
Application
Used repeatedly in semiconductor fabrication to define device and interconnect features that guide subsequent etch, implant, deposition, and related pattern-transfer steps.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/news-events/news/2013/08/new-grayscale-technique-opens-third-dimension-nanoscale-lithography
- Evidence from semiconductor.samsung.comhttps://semiconductor.samsung.com/support/tools-resources/dictionary/photoresist-printing-the-circuit-onto-the-wafer/