Definition
Semiconductor patterning process used to define features in a resist or other material layer, using approaches such as mask-based optical exposure or maskless direct writing.
Application
Used repeatedly to define device, contact, via, and interconnect patterns; optical implementations use controlled wavelength, optics, focus, and exposure.
Related search terms
semiconductor lithography; photolithography
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/technology/lithography-principles
- Evidence from nist.govhttps://www.nist.gov/news-events/news/2013/08/new-grayscale-technique-opens-third-dimension-nanoscale-lithography