Definition
The unintended transfer of contaminants from one wafer, material, chamber, batch, carrier or process stream to another that was previously clean or differently conditioned.
Application
Controlled by dedicated chambers or chemistries, validated cleaning, carrier segregation, materials compatibility and process sequencing because transferred metals, particles or films can create defects or alter later process behavior.
Related search terms
Cross-contamination; carryover contamination
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/en/technology-trends/topic/cross-contamination
- Evidence from downloads.semi.orghttps://downloads.semi.org/web/wstdsbal.nsf/c8f1681362290e72882581800081edd5/e8346956bc9fc54288258d000001dd32%21OpenDocument