Definition
Leak rate is the gas throughput flowing through a leak per unit time under stated pressure conditions, commonly expressed in units such as mbar·L/s or Pa·m³/s.
Application
Used to specify and verify allowable leakage of semiconductor vacuum systems, process chambers, gas lines, and sealed assemblies.
Related search terms
gas leak rate; vacuum leak rate
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Related concepts
Evidence and further reading
- Evidence from content.leybold.comhttps://content.leybold.com/migration/en/knowledge/what-is-the-definition-of-leak-rate
- Evidence from leybold.comhttps://www.leybold.com/en-us/knowledge/vacuum-fundamentals/leak-detection/basics-of-leak-detection.html
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.