Definition
Helium leak detection is a leak-testing method that uses helium as a tracer gas and a helium-sensitive mass spectrometer or sniffer to detect and quantify very small leaks.
Application
Semiconductor vacuum tools, gas systems, chambers, and sealed assemblies use helium leak testing to verify vacuum integrity and locate leakage paths before or during service.
Related search terms
helium mass spectrometer leak detection
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Related concepts
Evidence and further reading
- Evidence from agilent.comhttps://www.agilent.com/en/product/vacuum-technologies/helium-leak-detectors/helium-mass-spectrometer-leak-detectors-hld/hld-bd30-bench-dry-helium-leak-detector
- Evidence from agilent.comhttps://www.agilent.com/en/product/vacuum-technologies/helium-leak-detectors/portable-sniffer-leak-detector/phd-4-sniffer
Put this term into practice
Helium Leak Detection for Semiconductor Manufacturing — a one-day PT International LLC training course covering test methods, calibration and troubleshooting.