Definition
A ventilated, interlocked enclosure that houses hazardous process-gas cylinders and associated valves, regulators, purge hardware, and safety controls.
Application
Used in fab facilities to isolate toxic, flammable, corrosive, or pyrophoric gas sources and provide controlled connection to the process-gas distribution system.
Related search terms
Gas Cabinet
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Related concepts
Evidence and further reading
- Evidence from cerestechnologies.comhttps://www.cerestechnologies.com/en/our-products/nanopurge-gas-cabinets
- Evidence from stainlessdesign.comhttps://www.stainlessdesign.com/products/uhp-gas-cabinets/ciphercon-1500-gas-cabinet/