Definition
A network of fixed or tool-integrated detectors, alarms, controls, and communications used to detect hazardous gas releases or unsafe atmospheric conditions.
Application
Used around gas cabinets, valve boxes, subfabs, and process tools to trigger alarms, ventilation responses, isolation, or emergency shutdown actions.
Related search terms
Gas Monitoring System; GMS
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Related concepts
Evidence and further reading
- Evidence from honeywell.comhttps://www.honeywell.com/us/en/solutions/measurement-and-control/gas-detection/high-tech-semiconductors
- Evidence from honeywell.comhttps://www.honeywell.com/us/en/insights/articles/gas-detection-for-semiconductor-manufacturing-plants